Effects of N2 plasma pretreatment on the SiN passivation of AlGaN/GaN HEMT
- Romero, M.F.
- Jiménez, A.
- Miguel-Sánchez, J.
- Braña, A.F.
- González-Posada, F.
- Cuerdo, R.
- Calle, F.
- Muñoz, E.
ISSN: 0741-3106
Year of publication: 2008
Volume: 29
Issue: 3
Pages: 209-211
Type: Article