Tailoring of microstructure and optoelectronic properties of Aluminum doped Zinc Oxide changing gun tilt
- Fernández, S.
- Grandal, J.
- Trampert, A.
- Naranjo, F.B.
Journal:
Materials Science in Semiconductor Processing
ISSN: 1369-8001
Year of publication: 2017
Volume: 63
Pages: 115-121
Type: Article