Study of high In-content AlInN deposition on p-Si(111) by RF-sputtering

  1. Núñez-Cascajero, A.
  2. Monteagudo-Lerma, L.
  3. Valdueza-Felip, S.
  4. Navío, C.
  5. Monroy, E.
  6. González-Herráez, M.
  7. Naranjo, F.B.
Aldizkaria:
Japanese Journal of Applied Physics

ISSN: 1347-4065 0021-4922

Argitalpen urtea: 2016

Alea: 55

Zenbakia: 5

Mota: Biltzar ekarpena

DOI: 10.7567/JJAP.55.05FB07 GOOGLE SCHOLAR