Two-step method for the deposition of AlN by radio frequency sputtering
- Monteagudo-Lerma, L.
- Valdueza-Felip, S.
- Núñez-Cascajero, A.
- González-Herráez, M.
- Monroy, E.
- Naranjo, F.B.
Journal:
Thin Solid Films
ISSN: 0040-6090
Year of publication: 2013
Volume: 545
Pages: 149-153
Type: Article