Amorphous Silicon Films and Nanocolumns Deposited on Sapphire and GaN by DC Sputtering

  1. Sun, M.
  2. Valdueza-Felip, S.
  3. Naranjo, F.B.
Journal:
Physica Status Solidi (B) Basic Research

ISSN: 1521-3951 0370-1972

Year of publication: 2023

Volume: 260

Issue: 8

Type: Article

DOI: 10.1002/PSSB.202200578 GOOGLE SCHOLAR lock_openOpen access editor