Microfabrication of Sm2Co17 micromagnets for MEMS and micromotors using ultrashort pulsed hydro laser micromilling process

1. Villalba-Alumbreros, G.
2. Soler-Morala, J.
3. Bollero, A.
4. Kanitz, A.
5. Hoppius, J.
6. Valiente-Blanco, I.
7. Diez-Jimenez, E.