Sirona
Valdueza Felip
Profesor/a Titular Universidad
Universidad Carlos III de Madrid
Madrid, EspañaPublications in collaboration with researchers from Universidad Carlos III de Madrid (1)
2019
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High quality Al0.37In0.63N layers grown at low temperature (<300 °C) by radio-frequency sputtering
Materials Science in Semiconductor Processing, Vol. 100, pp. 8-14