Mejora de las características de los sensores magnéticos de piezoeléctrico y material ferromagnético
- J.L. Prieto
- P. Sánchez
- C. Aroca
- E. López
- M.C. Sánchez
- O. de Abril
- L. Pérez
ISSN: 0366-3175
Year of publication: 1999
Volume: 38
Issue: 6
Pages: 673-676
Type: Article
More publications in: Boletín de la Sociedad Española de Cerámica y Vidrio
Abstract
In this work we describe a new fabrication method for magnetostrictive-piezoelectric sensors that improve several characteristics. The mechanical coupling between the ferromagnetic and the piezoelectric has been optimised by means of a mixed method: electrolytic deposition of a copper layer, playing the role of polished interface, and sputtering deposition of a highly magnetostrictive material on the interface. This method allows to remove the viscous fluid, improving the sensitivity, time stability and opening the possibility to industrial fabrication. The fabrication method opens also the possibility of miniaturisation or even integration of the sensor.