Air-coupled linear and sparse cMUT array manufactured using MUMPs process

  1. Octavio, A.
  2. O'Leary, R.L.
  3. Whiteley, S.M.
  4. Martínez-Graullera, Ó.
  5. Martín-Arguedas, C.J.
  6. Gómez-Ullate, L.
  7. De Espinosa, F.M.
Journal:
Microsystem Technologies

ISSN: 0946-7076

Year of publication: 2011

Volume: 17

Issue: 10-11

Pages: 1635-1644

Type: Article

DOI: 10.1007/S00542-011-1346-3 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus