Air-coupled linear and sparse cMUT array manufactured using MUMPs process
- Octavio, A.
- O'Leary, R.L.
- Whiteley, S.M.
- Martínez-Graullera, Ó.
- Martín-Arguedas, C.J.
- Gómez-Ullate, L.
- De Espinosa, F.M.
ISSN: 0946-7076
Année de publication: 2011
Volumen: 17
Número: 10-11
Pages: 1635-1644
Type: Article