Deep level transient spectroscopy assessment of silicon contamination in AlGaAs layers grown by metalorganic vapor phase epitaxy

  1. Calleja, E.
  2. Sanchez, F.
  3. Muñoz, E.
  4. Gibart, P.
  5. Powell, A.
  6. Roberts, J.S.
Journal:
Journal of Electronic Materials

ISSN: 1543-186X,  0361-5235

Year of publication: 1995

Volume: 24

Issue: 8

Pages: 1017-1022

Type: Article

DOI: 10.1007/BF02652976 GOOGLE SCHOLAR
Data source: Scopus